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Journal of Micro-Nanolithography MEMS and MOEMS

创始人研老师

期刊基本信息

期刊名称：Journal of Micro-Nanolithography MEMS and MOEMS

出版国家或地区：UNITED STATES

是否OA：No

期刊ISSN：1932-5150

期刊官方网站：http://www.spie.org/publications/journals/journal-of-micro/nanolithography-mems-and-moems

期刊投稿网址：https://jm3.msubmit.net/cgi-bin/main.plex

通讯方式：SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225

涉及的研究方向：ENGINEERING, ELECTRICAL & ELECTRONIC-NANOSCIENCE &

出版周期：Quarterly

出版年份：2007

期刊数据表：

最新中科院JCR分区

大类(学科)

小类(学科)

JCR学科排名

工程技术

ENGINEERING, ELECTRICAL & ELECTRONIC(工程学，电气和电子) 4区 MATERIALS SCIENCE, MULTIDISCIPLINARY(材料科学，跨学科) 4区 NANOSCIENCE & NANOTECHNOLOGY(纳米科学和纳米技术) 4区 OPTICS(光学) 4区

179/260 206/285 80/92 62/94

Journal of Micro-Nanolithography MEMS and MOEMS英文简介：

The Journal of Micro-Nanolithography MEMS and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

Journal of Micro-Nanolithography MEMS and MOEMS中文简介：

《微纳米光刻机MEMS和MOEMS杂志》（JM3）发表了有关光刻、制造、包装和集成技术的科学、发展和实践的论文，以满足电子、MEMS、MOEMS和光子学行业的需要。这类装置的范围很广，包括生物医学微装置、微流体、传感器和执行器、自适应光学和数字微镜。范围广泛，有助于促进期刊服务的社区之间的协同作用和利益。